JPH053481Y2 - - Google Patents
Info
- Publication number
- JPH053481Y2 JPH053481Y2 JP10635387U JP10635387U JPH053481Y2 JP H053481 Y2 JPH053481 Y2 JP H053481Y2 JP 10635387 U JP10635387 U JP 10635387U JP 10635387 U JP10635387 U JP 10635387U JP H053481 Y2 JPH053481 Y2 JP H053481Y2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- chuck plate
- suction chuck
- hole
- wire rods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011148 porous material Substances 0.000 description 6
- 238000005245 sintering Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000003670 easy-to-clean Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Feeding Of Workpieces (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10635387U JPH053481Y2 (en]) | 1987-07-13 | 1987-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10635387U JPH053481Y2 (en]) | 1987-07-13 | 1987-07-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6412039U JPS6412039U (en]) | 1989-01-23 |
| JPH053481Y2 true JPH053481Y2 (en]) | 1993-01-27 |
Family
ID=31339783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10635387U Expired - Lifetime JPH053481Y2 (en]) | 1987-07-13 | 1987-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH053481Y2 (en]) |
-
1987
- 1987-07-13 JP JP10635387U patent/JPH053481Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6412039U (en]) | 1989-01-23 |
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